VEECO
1. VEECO uses high-speed rotation, but there is no rotation, so there is obvious uniformity between within-wafer and ring-ring, but the uniformity in run-run and ring is excellent, which is why its equipment is more suitable for LED production. Because the LED has a binning step, the uniformity of the ring-ring can be solved by binning, but if the epitaxial structures such as growth DFB and VCSEL are closely related to each other and the degree of mutual influence can cause the overall function of the device to be lost, VEECO But the power is not at heart.
2. In addition to the annual maintenance, the VEECO equipment is not open to the furnace. It is suitable for large-scale production. It can also alternate between 2 pallets. As long as the annual maintenance is completed, the furnace body and the tray are properly covered, within 1-2 months. Stabilize the device, you can use it with confidence, and at the same time, it can be explored regularly within a few months. However, it should be noted that the replacement of the tray will still cause parameter changes.
3. However, the furnace body of the VEECO equipment is relatively large. Although it has been recently reduced, it is still wasteful in gas consumption, but it cannot be further reduced, which is related to the furnace design and growth optimization mechanism.
4. Also, when using VEECO to grow some materials that are mutually polluted, there are residual problems, and the solution is to remove the furnace, which increases the maintenance cost, so VEECO is suitable for repeated growth of the same product. |